Thermal characteristics of silicon wafers over time

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  • 2010.06.29 / 2019.12.24
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목차
1. Introduction
2. Experimental
3. Results
4. Discussion
5. Conclusion
본문내용
Oxide formation temperature zones(1) 250-600℃ : Anodic oxidation, CVD, Sputerring(2) 600-900℃ : CVD (TEOS organic pyrolysis)(3) 900-1200 ℃ : Heat Oxidation(dry / wet)


dry oxidation
Usually due to excellent SiO2 surface properties used to form a thin oxide in the device structure
Si + O2 → SiO2


wet oxidation
Due to rapid growth rates used to form a thick
Layer. About 10 times faster than dry oxidation
Si + 2H2O → SiO2 + 2H2


Notes
Silicon wafer that should not be a sudden
change of temperature.
Oxidation at low temperature,
the temperature must be heated slowly.


2)The reason why there is a difference so as to increase heat-treatment time

time Conductivity Resistivity

Such a reason difference
electrical conduction is affected by concentration and mobility
- p-type : mobility more suddenly decrease than the sheep that concentration increases because hall is a major carriers
- n-type : Decreasing


참고문헌
-알기 쉬운 반도체 공학
정용성 저, 정일 출판사

-반도체 소자 공정기술
Michael Quirk, Julian Serda 원저

-반도체 집적 공정
곽계달, 김태환, 박재근, 박종완, 전형탁 지음, 학술정보

-반도체 공정기술
황호정 저, 생능 출판사

-재료과학 프린터물
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